rf mems switches and integrated switching circuits pdf

Rf Mems Switches And Integrated Switching Circuits Pdf

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Radio frequency microelectromechanical system RF-MEMS switches have demonstrated superior electrical performance lower loss and higher isolation compared to semiconductor-based devices to implement reconfigurable microwave and millimeter mm -wave circuits. In this chapter, electrostatically actuated RF-MEMS switch configurations that can be easily integrated in uniplanar circuits are presented.

RF MEMS Switches and Integrated Switching Circuits

Skip to search form Skip to main content You are currently offline. Some features of the site may not work correctly. DOI: Liu and A. Yu and M. Karim and M. Liu , A. Tang Published Engineering. Radio frequency RF microelectromechanical systems MEMS have been pursued for more than a decade as a solution of high-performance on-chip fixed, tunable and reconfigurable circuits. The research work first concentrates on the development of lateral DC-contact switches and capacitive shunt switches.

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Photonic micromachined devices : design, fabrication and experiment. View 1 excerpt, references background. Low-loss lateral micromachined switches for high frequency applications. View 2 excerpts, references background and methods.

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RF MEMS Switches and Integrated Switching Circuits Design Fabrication and Test PDF Book

Suganthi I ; K. Murugesan II ; S. Raghavan III. Email: sugi yahoo. The double beam structure has been analyzed in terms of its return, isolation and insertion losses with the variation of its passive circuit component values. The effect of design parameters has been analyzed and the lateral switch was realized with low insertion loss, high return and isolation losses.

RF MEMS Switches and Integrated Switching Circuits Design, Fabrication and Test by Ai Qun Liu

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RF-MEMS switches for reconfigurable integrated circuits

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It is designed on high-resistivity silicon substrate and has a compact area of 1. The series or ohmic switches have been designed to provide low insertion loss with good ohmic contact. The pull-in voltage for ohmic switches is calculated to be 7. Shunt or capacitive switches have been used in each port to improve the isolation for higher frequencies. Microelectromechanical Systems MEMS with their extremely small dimensions and full integration into the Radio Frequency RF front ends of various telecommunication devices have emerged as the most promising technology over the past few decades. There is an increasing demand of devices having extremely high performance at low power consumption and compact size in various satellite, defence, and communication systems. The RF MEMS switches allow for high isolation in open-circuit state, low insertion loss, and high linearity [ 1 ], which is very important in RF subsystems.

Skip to search form Skip to main content You are currently offline. Some features of the site may not work correctly. DOI: Liu and A. Yu and M. Karim and M.

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Design and fabrication of micromachined RF switches and integrated switching circuits. Doctoral thesis, Nanyang Technological University, Singapore. The movable part is a highaspect-ratio silicon Si cantilever beam coated by metal. The electromagnetic modeling and design as well as mechanical modeling and design are depicted in detail.

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RF MEMS Switches and Integrated Switching Circuits

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